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📙 Etching of III-V semiconductors: an electrochemical approach by Peter H.L. Notten, Jan E.A.M. Meerakker, John J. Kelly. — download pdf


This research book reviews the important recent advances in the rapidly expanding III-V field. A complete reference that examines the fundamental aspects of different etching systems and their suitability in major application areas. Each system is classified according to mechanism and kinetics.

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